@article{yjycl2108474172558409730,
  title = {超高纯钨靶在集成电路中的应用及其制造工艺研究},
  author = {李铭铭},
  journal = {冶金与材料},
  year = {2026},
  number = {10},
  pages = {65--65},
  issn = {2096-4854},
  url = {https://yjycl.hljsm.org.cn/articles/2108474172558409730},
}